On the longevity and inherent hermeticity of silicon-ICs evaluation of bare-die and PDMS-coated ICs after accelerated aging and implantation studies /

Silicon integrated circuits (ICs) are central to the next-generation miniature active neural implants, whether packaged in soft polymers for flexible bioelectronics or implanted as bare die for neural probes. These emerging applications bring the IC closer to the corrosive body environment, raising...

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Bibliographic Details
Main Authors: Nanbakhsh Kambiz
Shah Idil Ahmad
Lamont Callum
Dücső Csaba
Akgun Ömer Can
Horváth Domonkos
Tóth Kinga
Meszéna Domokos
Ulbert István
Mazza Federico
Constandinou Timothy G.
Serdijn Wouter
Vanhoestenberghe Anne
Donaldson Nick
Giagka Vasiliki
Format: Article
Published: 2025
Series:NATURE COMMUNICATIONS 16 No. 1
Subjects:
mtmt:35664636
Online Access:https://publikacio.ppke.hu/1953
Description
Summary:Silicon integrated circuits (ICs) are central to the next-generation miniature active neural implants, whether packaged in soft polymers for flexible bioelectronics or implanted as bare die for neural probes. These emerging applications bring the IC closer to the corrosive body environment, raising reliability concerns, particularly for chronic use. Here, we evaluate the inherent hermeticity of bare die ICs, and examine the potential of polydimethylsiloxane (PDMS), a moisture-permeable elastomer, as a standalone encapsulation material. For this aim, the electrical and material performance of ICs sourced from two foundries was evaluated through one-year accelerated in vitro and in vivo studies. ICs featured custom-designed test structures and were partially PDMS coated, creating two regions on each chip, uncoated “bare die” and “PDMS-coated”. During the accelerated in vitro study, ICs were electrically biased and periodically monitored. Results revealed stable electrical performance, indicating the unaffected operation of ICs even when directly exposed to physiological fluids. Despite this, material analysis revealed IC degradation in the bare regions. PDMS-coated regions, however, revealed limited degradation, making PDMS a suitable IC encapsulant for years-long implantation. Based on the new insights, guidelines are proposed that may enhance the longevity of implantable ICs, broadening their applications in the biomedical field.
ISSN:2041-1723